Open AccessTrends in Microfabrication Capabilities & Device Architectures.
Author(s) -
Todd Bauer,
Adam Jones,
Anthony L. Lentine,
John Mudrick,
Murat Okandan,
Arun Rodrigues
Publication year - 2015
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/1184366
Subject(s) - microfabrication , miniaturization , microelectronics , electronics , computer science , nanotechnology , systems engineering , engineering , data science , electrical engineering , materials science , medicine , alternative medicine , pathology , fabrication
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