Open AccessMetrology for Industry for use in the Manufacture of Grazing Incidence Beam Line Mirrors
Author(s) -
James P. Metz,
Robert E. Parks
Publication year - 2014
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/1165166
Subject(s) - optics , metrology , sensitivity (control systems) , specular reflection , interferometry , device under test , observational error , mathematics , physics , statistics , engineering , electronic engineering , scattering parameters
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