Open AccessMetrology of 3D nanostructures.
Author(s) -
Anthony Barsic,
Rafael Piestun,
Robert R. Boye
Publication year - 2012
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/1144015
Subject(s) - common emitter , metrology , resolution (logic) , diffraction , noise (video) , function (biology) , superresolution , quantum metrology , physics , quantum , quantum dot , nanostructure , optics , computational physics , statistical physics , nanotechnology , computer science , image (mathematics) , optoelectronics , materials science , quantum mechanics , artificial intelligence , quantum simulator , open quantum system , evolutionary biology , biology
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