Open AccessTHE DESIGN OF AN RF ANTENNA FOR A LARGE-BORE, HIGH POWER, STEADY STATE PLASMA PROCESSING CHAMBER FOR MATERIAL SEPARATION - CRADA FINAL REPORT for CRADA Number ORNL00-0585
Author(s) -
D. A. Rasmussen,
R. L. Freeman
Publication year - 2001
Language(s) - English
Resource type - Reports
DOI - 10.2172/1134263
Subject(s) - antenna (radio) , power (physics) , plasma , electrical engineering , steady state (chemistry) , radio frequency , separation (statistics) , voltage , engineering , high voltage , materials science , nuclear engineering , computer science , physics , chemistry , machine learning , quantum mechanics