Open AccessHigh-Rate Fabrication of a-Si-Based Thin-Film Solar Cells Using Large-Area VHF PECVD Processes
Author(s) -
Xunming Deng,
Qi Hua Fan
Publication year - 2011
Language(s) - English
Resource type - Reports
DOI - 10.2172/1132817
Subject(s) - plasma enhanced chemical vapor deposition , fabrication , materials science , tandem , silicon , optoelectronics , thin film solar cell , solar cell , composite material , medicine , alternative medicine , pathology