Open AccessPlasma Initiation in DC Low Energy Sputtering Systems
Author(s) -
Jeremiah Williams,
D. Jelinek
Publication year - 1966
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/1130309
Subject(s) - feedthrough , anode , sputtering , plasma , materials science , voltage , electrical engineering , low voltage , glow discharge , optoelectronics , high voltage , energy (signal processing) , engineering , physics , nanotechnology , electrode , thin film , nuclear physics , quantum mechanics