Open AccessHigh Current Low Energy Beam Transport for Ion Implanters
Author(s) -
U.S. Rohatgi,
Michael Furey
Publication year - 2012
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/1079420
Subject(s) - faraday cup , beamline , atomic physics , plasma , langmuir probe , beam (structure) , ion , electron , faraday cage , ion beam , ion beam deposition , scattering , cathode ray , current (fluid) , materials science , plasma diagnostics , chemistry , optics , physics , nuclear physics , magnetic field , organic chemistry , quantum mechanics , thermodynamics
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