Open AccessCollective behaviors of the Casimir force in microelectromechanical systems
Author(s) -
H. B. Chan,
J. Yelton
Publication year - 2013
Language(s) - English
Resource type - Reports
DOI - 10.2172/1060378
Subject(s) - casimir effect , casimir pressure , microelectromechanical systems , physics , silicon , chip , transducer , surface force , classical mechanics , mechanics , quantum electrodynamics , quantum mechanics , optoelectronics , electrical engineering , engineering