Open AccessFinal Report: Mechanisms of sputter ripple formation: coupling among energetic ions, surface kinetics, stress and composition
Author(s) -
Eric Chason,
Vivek B. Shenoy
Publication year - 2013
Language(s) - English
Resource type - Reports
DOI - 10.2172/1060286
Subject(s) - ripple , sputtering , ion , chemical physics , nanoscopic scale , nanostructure , kinetics , coupling (piping) , materials science , nanotechnology , pattern formation , stress (linguistics) , chemistry , thin film , physics , thermodynamics , composite material , power (physics) , genetics , organic chemistry , quantum mechanics , biology , linguistics , philosophy