Open AccessChemical characterization of a polyphosphoric acid etchant
Author(s) -
Theodore J. Morin
Publication year - 1978
Language(s) - English
Resource type - Reports
DOI - 10.2172/6387382
Subject(s) - chloride , aluminium , etching (microfabrication) , characterization (materials science) , fabrication , materials science , hydrochloric acid , chemistry , inorganic chemistry , nuclear chemistry , chemical engineering , metallurgy , nanotechnology , engineering , medicine , alternative medicine , layer (electronics) , pathology