Open AccessProspects for using silicon resonator in resonant pressure transducers
Author(s) -
D. A. Kudryavtseva,
S. R. Taishev
Publication year - 2017
Publication title -
inžiniring i tehnologii
Language(s) - English
Resource type - Journals
ISSN - 2587-7704
DOI - 10.21685/2587-7704-2017-2-1-5
Subject(s) - resonator , silicon , acoustics , materials science , transducer , pressure sensor , optoelectronics , engineering , physics , mechanical engineering