Open AccessOPTIMIZATION OF THE PARAMETERS OF A SEMICONDUCTOR SENSING ELEMENT IN THE FORM OF A ROUND MEMBRANE IN ORDER TO INCREASE THE SENSITIVITY AND REDUCE THE LINEARITY ERROR OF THE OUTPUT SIGNAL
Author(s) -
E.A. Ryblova,
V.S. Volkov
Publication year - 2022
Publication title -
izmerenie, monitoring, upravlenie, kontrolʹ
Language(s) - English
Resource type - Journals
ISSN - 2307-5538
DOI - 10.21685/2307-5538-2022-1-9
Subject(s) - sensitivity (control systems) , linearity , signal (programming language) , element (criminal law) , semiconductor , order (exchange) , membrane , electronic engineering , control theory (sociology) , computer science , materials science , engineering , optoelectronics , chemistry , artificial intelligence , biochemistry , finance , law , political science , economics , programming language , control (management)