Open AccessOPTIMIZATION OF THE PARAMETERS OF THE SEMICONDUCTOR SENSOR ELEMENT IN THE FORM OF A CIRCULAR MEMBRANE IN ORDER TO INCREASE THE SENSITIVITY
Author(s) -
Elizaveta A. Ryblova,
Vadim Volkov
Publication year - 2021
Publication title -
izmerenie, monitoring, upravlenie, kontrolʹ
Language(s) - English
Resource type - Journals
ISSN - 2307-5538
DOI - 10.21685/2307-5538-2021-2-5
Subject(s) - sensitivity (control systems) , semiconductor , membrane , element (criminal law) , order (exchange) , materials science , biological system , optoelectronics , electronic engineering , engineering , chemistry , biology , business , political science , biochemistry , finance , law