Open AccessMANAGEMENT OF ELECTROPHYSICAL CHARACTERISTICS OF THE POLYSILICON SENSORY STRUCTURES OF MICROELECTRONIC SENSORS
Author(s) -
П. Г. Михайлов,
T. A. Glebova,
А. В. Соколов,
A. U. Analieva,
А. В. Михайлов,
E. D. Fadeev
Publication year - 2019
Publication title -
izmerenie, monitoring, upravlenie, kontrolʹ
Language(s) - English
Resource type - Journals
ISSN - 2307-5538
DOI - 10.21685/2307-5538-2019-3-12
Subject(s) - microelectronics , sensory system , materials science , electrical engineering , optoelectronics , engineering , neuroscience , psychology