Open AccessPHYSICAL AND CHEMICAL BASES OF THE ANODE COMPOUND OF MICROELECTROMECHANICAL SYSTEMS ELEMENTS
Author(s) -
V.E. Pautkin
Publication year - 2019
Publication title -
izmerenie, monitoring, upravlenie, kontrolʹ
Language(s) - English
Resource type - Journals
ISSN - 2307-5538
DOI - 10.21685/2307-5538-2019-2-11
Subject(s) - anode , materials science , computer science , nanotechnology , chemistry , electrode