Open AccessCONTROLLED SYNTHESIS OF THIN FILMS OBTAINED BY MAGNETRON SPUTTERING TECHNIQUE
Author(s) -
K. E. Utkin,
S. I. Torgashin,
A. V. Khoshev
Publication year - 2018
Publication title -
izmerenie, monitoring, upravlenie, kontrolʹ
Language(s) - English
Resource type - Journals
ISSN - 2307-5538
DOI - 10.21685/2307-5538-2018-2-6
Subject(s) - materials science , high power impulse magnetron sputtering , sputter deposition , cavity magnetron , thin film , sputtering , optoelectronics , engineering physics , nanotechnology , physics