Open AccessGEOMETRICAL STOP-ETCHING IN MICROELECTROMECHANICAL SYSTEMS TECHNOLOGY
Author(s) -
V.E. Pautkin,
S. V. Prilutskaya
Publication year - 2017
Publication title -
izmerenie, monitoring, upravlenie, kontrolʹ
Language(s) - Uncategorized
Resource type - Journals
ISSN - 2307-5538
DOI - 10.21685/2307-5538-2017-4-7
Subject(s) - microelectromechanical systems , etching (microfabrication) , materials science , nanotechnology , optoelectronics , layer (electronics)