Open AccessMANUFACTURING TECHNOLOGY OF THE SEMICONDUCTOR SENSITIVE ELEMENT OF THE PRESSURE SENSOR BASED POLYCRYSTALLINE DIAMOND
Author(s) -
Kseniya Y. Kraynova
Publication year - 2017
Publication title -
izmerenie, monitoring, upravlenie, kontrolʹ
Language(s) - English
Resource type - Journals
ISSN - 2307-5538
DOI - 10.21685/2307-5538-2017-3-13
Subject(s) - polycrystalline diamond , diamond , pressure sensor , materials science , semiconductor , optoelectronics , crystallite , engineering physics , metallurgy , mechanical engineering , engineering