Open AccessRESEARCH OF INFLUENCE OF THE CONSTRUCTIVE SIZES ON CHARACTERISTIC THE SENSITIVE ELEMENT OF A SILICON RESONANT PRESSURE TRANSDUCER
Author(s) -
D. A. Kudryavtseva
Publication year - 2017
Publication title -
izmerenie, monitoring, upravlenie, kontrolʹ
Language(s) - English
Resource type - Journals
ISSN - 2307-5538
DOI - 10.21685/2307-5538-2017-3-11
Subject(s) - transducer , silicon , constructive , element (criminal law) , pressure sensor , materials science , acoustics , engineering , optoelectronics , mechanical engineering , computer science , physics , political science , process (computing) , law , operating system