Open AccessPREDICTION OF THE PLANAR MAGNETRON EROSION ZONE
Author(s) -
I. Gorbunov,
Alexander Kolesnikov,
Yu. A. Kryukov,
T. A. Smolyanin
Publication year - 2020
Publication title -
nadežnostʹ i kačestvo složnyh sistem
Language(s) - English
Resource type - Journals
ISSN - 2307-4205
DOI - 10.21685/2307-4205-2020-1-7
Subject(s) - planar , cavity magnetron , erosion , materials science , geology , environmental science , computer science , geomorphology , computer graphics (images) , nanotechnology , thin film , sputtering