Open AccessA formation of nanostructured anodic oxide on the silicon surface
Author(s) -
M. Yu. Makhmud-Akhunov,
I.O. Karachev,
B.B. Kostishko,
Research-and-production enterprise “Zavod Iskra”
Publication year - 2021
Publication title -
izvestiâ vysših učebnyh zavedenij. povolžskij region. fiziko-matematičeskie nauki
Language(s) - English
Resource type - Journals
ISSN - 2072-3040
DOI - 10.21685/2072-3040-2021-2-8
Subject(s) - silicon , materials science , anode , oxide , nanotechnology , surface (topology) , anodic aluminum oxide , silicon oxide , chemical engineering , metallurgy , chemistry , electrode , fabrication , engineering , geometry , mathematics , medicine , alternative medicine , silicon nitride , pathology