Open AccessSELECTIVE SPUTTERING OF STEEL EK-181 (RUSFER)
Author(s) -
А. В. Голубева,
B.I. Khripunov,
V.H. Alimov,
N.N. Presnyakova,
N. P. Bobyr,
V.M. Chernov
Publication year - 2021
Publication title -
voprosy atomnoj nauki i tehniki. seriâ, termoâdernyj sintez
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.343
H-Index - 7
ISSN - 0202-3822
DOI - 10.21517/0202-3822-2021-44-3-63-74
Subject(s) - sputtering , materials science , metallurgy , nanotechnology , thin film