Open AccessNEW METHOD OF EUV SPECTRA PROCESSING FOR HIGH-TEMPERATURE PLASMA DIAGNOSTIC
Author(s) -
E.D. Kazakov,
A.P. Shevelko
Publication year - 2014
Publication title -
voprosy atomnoj nauki i tehniki. seriâ, termoâdernyj sintez
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.343
H-Index - 7
ISSN - 0202-3822
DOI - 10.21517/0202-3822-2014-37-4-71-75
Subject(s) - extreme ultraviolet lithography , plasma , spectral line , materials science , computer science , physics , nanotechnology , nuclear physics , astronomy