Open AccessInductively coupled plasma etching of InP/InGaAs heterostructure for optical waveguide structures
Author(s) -
S. V. Ishutkin,
V. S. Arykov,
Y. S. Zhidik,
P. E. Troyan
Publication year - 2018
Publication title -
doklady tomskogo gosudarstvennogo universiteta sistem upravleniâ i radioèlektroniki
Language(s) - English
Resource type - Journals
ISSN - 1818-0442
DOI - 10.21293/1818-0442-2018-21-4-28-32
Subject(s) - heterojunction , etching (microfabrication) , optoelectronics , inductively coupled plasma , materials science , plasma etching , plasma , waveguide , optics , nanotechnology , physics , layer (electronics) , quantum mechanics