Open AccessIon-plasma methods to obtain nanostructures
Author(s) -
T. I. Danilina
Publication year - 2017
Publication title -
doklady tomskogo gosudarstvennogo universiteta sistem upravleniâ i radioèlektroniki
Language(s) - Uncategorized
Resource type - Journals
ISSN - 1818-0442
DOI - 10.21293/1818-0442-2017-20-3-40-45
Subject(s) - plasma , ion , materials science , nanostructure , nanotechnology , chemistry , physics , nuclear physics , organic chemistry