Open AccessIMPROVING SEALING ELEMENT QUALITY BY ION-PLASMA SPUTTERING
Author(s) -
Sergey I. Aganaev,
N. V. Astrakhantsev,
С. А. Зайдес
Publication year - 2018
Publication title -
vestnik irkutskogo gosudarstvennogo tehničeskogo universiteta
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2500-1590
pISSN - 1814-3520
DOI - 10.21285/1814-3520-2018-11-199-208
Subject(s) - materials science , sputtering , scanning electron microscope , composite material , coating , leakage (economics) , ion source , flange , analytical chemistry (journal) , ion , nanotechnology , thin film , chemistry , organic chemistry , chromatography , economics , macroeconomics