Open AccessTHE EFFECT OF OXYGEN CONCENTRATION ON MICROSTRUCTURE, MORPHOLOGY AND OPTICAL PROPERTIES OF ZINC OXIDE FILMS FORMED BY DUAL MAGNETRON SPUTTERING
Author(s) -
С. А. Зайцев,
V. S. Vashchilin,
V. V. Kolesnik,
М.В. Лимаренко,
Dmitry Prokhorenkov,
Е.И. Евтушенко
Publication year - 2017
Publication title -
vestnik irkutskogo gosudarstvennogo tehničeskogo universiteta
Language(s) - English
Resource type - Journals
eISSN - 2500-1590
pISSN - 1814-3520
DOI - 10.21285/1814-3520-2017-8-167-175
Subject(s) - microstructure , zinc , sputter deposition , materials science , oxygen , sputtering , morphology (biology) , dual (grammatical number) , metallurgy , oxide , cavity magnetron , chemical engineering , thin film , nanotechnology , chemistry , art , literature , organic chemistry , engineering , biology , genetics