Open AccessComparison between the Electrical Properties and Structures after Atmosphere Annealing and Vacuum Annealing of IGZO Thin Films
Author(s) -
Young Deuk Ann,
Jae Ho Yeon,
Teresa Oh
Publication year - 2016
Publication title -
saneop jinheung yeon-gu/saneop jinheung yeongu
Language(s) - English
Resource type - Journals
eISSN - 2714-013X
pISSN - 2466-1139
DOI - 10.21186/ipr.2016.1.1.007
Subject(s) - annealing (glass) , materials science , amorphous solid , ohmic contact , oxygen , schottky barrier , atmosphere (unit) , optoelectronics , composite material , crystallography , chemistry , thermodynamics , organic chemistry , physics , layer (electronics) , diode