Open AccessProduction of target cathodes from composite silicides for applying protective coatings using casting and deformation technologies
Author(s) -
И. А. Иванов,
А. Г. Слуцкий,
В. А. Шейнерт,
Anatoly I. Ivanov,
А. Н. Белый
Publication year - 2021
Publication title -
litʹë i metallurgiâ
Language(s) - English
Resource type - Journals
eISSN - 2414-0406
pISSN - 1683-6065
DOI - 10.21122/1683-6065-2021-2-68-75
Subject(s) - materials science , cathode , pressing , metallurgy , raw material , composite number , silicide , vacuum arc , evaporation , casting , deformation (meteorology) , alloy , composite material , silicon , electrical engineering , chemistry , physics , organic chemistry , thermodynamics , engineering
Thearticlediscussestheresultsof manufacturing multicomponent consumable cathodes of vacuum electric arc evaporation plants. To obtain ingots of complex silicide as a raw material for the manufacture of target cathodes, it is proposed to use induction melting of pure metal charge materials in an argon atmosphere. Themethodmadeit possible to obtain ingots of complex silicide with a composition close to the calculated one and a density of at least 93 %. Further forming of the cathode takes place when controlling the powder fractions by their percentage ratio with a pressing force of at least 50 tons. The results obtained are compared with the SHS method of manufacturing cathodes of identical composition.