Open AccessFeatures of formation in radial and axial directions of electron beams emitted secondary-magnetron gun
Author(s) -
А. С. Мазманишвили,
Николай Григорьевич Решетняк
Publication year - 2017
Publication title -
vestnik nacionalʹnogo tehničeskogo universiteta "hpi". sistemnyj analiz, upravlenie i informacionnye tehnologii/vestnik nacionalʹnogo tehničeskogo universiteta "hpi". seriâ sistemnyj analiz, upravlenie i informacionnye tehnologii
Language(s) - English
Resource type - Journals
eISSN - 2410-2857
pISSN - 2079-0023
DOI - 10.20998/2079-0023.2017.28.08
Subject(s) - cavity magnetron , beam (structure) , cathode , cathode ray , magnetic field , solenoid , faraday cup , electron gun , electron , atomic physics , physics , cylinder , optics , materials science , ion beam , nuclear physics , electrical engineering , engineering , thin film , mechanical engineering , quantum mechanics , sputtering