Open AccessInfluence Produced by the Orientation of Slot Rows in the Cylindrical Section of the Entrance Edge on the Film Deposition Efficiency
Author(s) -
V Yu Petelchyts,
D N Pysmennyi,
Yu J Dashevskyy
Publication year - 2015
Publication title -
vestnik nacionalʹnogo tehničeskogo universiteta "hpi". seriâ: ènergetičeskie i teplotehničeskie processy i oborudovanie/vestnik nacionalʹnogo tehničeskogo universiteta "hpi". ènergetičeskie i teplotehničeskie processy i oborudovanie
Language(s) - English
Resource type - Journals
eISSN - 2707-7543
pISSN - 2078-774X
DOI - 10.20998/2078-774x.2015.15.09
Subject(s) - inlet , row , section (typography) , enhanced data rates for gsm evolution , deposition (geology) , geometry , materials science , cross section (physics) , orientation (vector space) , computer simulation , mechanics , structural engineering , optics , geology , engineering , physics , computer science , mechanical engineering , mathematics , telecommunications , paleontology , database , sediment , operating system , quantum mechanics