Redesigned Microcantilevers for Sensitivity Improvement of Microelectromechanical System Tactile Sensors | Zendy

Ren Kaneta | Zendy; Takumi Hasegawa | Zendy; Jun Kido | Zendy; Takashi Abe | Zendy; Masayuki Sohgawa | Zendy

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Redesigned Microcantilevers for Sensitivity Improvement of Microelectromechanical System Tactile Sensors

Author(s) -

Ren Kaneta,

Takumi Hasegawa,

Jun Kido,

Takashi Abe,

Masayuki Sohgawa

Publication year - 2022

Publication title -

journal of robotics and mechatronics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.257

H-Index - 19

eISSN - 1883-8049

pISSN - 0915-3942

DOI - 10.20965/jrm.2022.p0677

Subject(s) - cantilever , tactile sensor , sensitivity (control systems) , microelectromechanical systems , strain gauge , soft sensor , materials science , data acquisition , gauge factor , computer science , acoustics , texture (cosmology) , artificial intelligence , computer vision , robot , electronic engineering , engineering , optoelectronics , physics , fabrication , process (computing) , medicine , alternative medicine , pathology , image (mathematics) , composite material , operating system

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