Open AccessRedesigned Microcantilevers for Sensitivity Improvement of Microelectromechanical System Tactile Sensors
Author(s) -
Ren Kaneta,
Tetsuya Hasegawa,
Jun Kido,
Takashi Abe,
Masayuki Sohgawa
Publication year - 2022
Publication title -
journal of robotics and mechatronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.257
H-Index - 19
eISSN - 1883-8049
pISSN - 0915-3942
DOI - 10.20965/jrm.2022.p0677
Subject(s) - cantilever , tactile sensor , sensitivity (control systems) , microelectromechanical systems , strain gauge , soft sensor , materials science , data acquisition , gauge factor , computer science , acoustics , texture (cosmology) , artificial intelligence , computer vision , robot , electronic engineering , engineering , optoelectronics , physics , fabrication , process (computing) , medicine , alternative medicine , pathology , image (mathematics) , composite material , operating system