Open AccessA MEMS Device Integrating Multiple Cantilever Displacement Sensors to Evaluate Flat Machined Surfaces
Author(s) -
Yuki Shimizu,
Koichi Tamiya,
Shoichiro Mizukami,
Yuuma Tamaru
Publication year - 2022
Publication title -
international journal of automation technology
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.513
H-Index - 18
eISSN - 1883-8022
pISSN - 1881-7629
DOI - 10.20965/ijat.2022.p0582
Subject(s) - cantilever , microelectromechanical systems , fabrication , displacement (psychology) , materials science , acoustics , etching (microfabrication) , waviness , optoelectronics , nanotechnology , composite material , layer (electronics) , medicine , psychology , alternative medicine , physics , pathology , psychotherapist
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