Open AccessDesign and Testing of a Compact Optical Angle Sensor for Pitch Deviation Measurement of a Scale Grating with a Small Angle of Diffraction
Author(s) -
Lue Quan,
Yuki Shimizu,
Ryo Sato,
Dong Wook Shin,
Hiraku Matsukuma,
Andreas Archenti,
Wei Gao
Publication year - 2022
Publication title -
international journal of automation technology
Language(s) - English
Resource type - Journals
eISSN - 1883-8022
pISSN - 1881-7629
DOI - 10.20965/ijat.2022.p0572
Subject(s) - optics , collimator , diffraction , diffraction grating , grating , materials science , laser , optical axis , physics , lens (geology)