Open AccessDesign Concept and Structural Configuration of Magnetic Levitation Stage with Z-Assist System
Author(s) -
Motohiro Takahashi
Publication year - 2021
Publication title -
international journal of automation technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.513
H-Index - 18
eISSN - 1883-8022
pISSN - 1881-7629
DOI - 10.20965/ijat.2021.p0706
Subject(s) - magnetic levitation , levitation , thrust , electrodynamic suspension , compensation (psychology) , electromagnetic coil , control theory (sociology) , engineering , magnet , magnetic field , electrical engineering , mechanical engineering , computer science , physics , magnetic energy , magnetization , psychology , control (management) , quantum mechanics , artificial intelligence , psychoanalysis
Magnetic levitation technology is expected to provide a solution for achieving nanometer-scale positioning accuracy. However, magnetic leakage limits the application of the magnetic levitation stage. To reduce magnetic density, motors should be installed at an appropriate distance from the table. This increases the axis interference between the horizontal thrust and the pitching, making it difficult to achieve stable levitation. In this study, a magnetic levitation stage system that has a unique motor structure fusing a gravity compensation function and pitching moment compensation is proposed. This compensation mechanism operates automatically using the passive magnetic circuit structure, ensuring that noises from the coil current and the timing gaps do not affect the driving characteristics and that neither wiring nor sensors are required. The basic characteristics were evaluated through the driving experiments, and the efficiency of the proposed gravity and pitching moment compensation system was demonstrated.