Open AccessMeasurement Range Expansion of Chromatic Confocal Probe with Supercontinuum Light Source
Author(s) -
Hiraku Matsukuma,
Ryo Sato,
Yuki Shimizu,
Wei Gao
Publication year - 2021
Publication title -
international journal of automation technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.513
H-Index - 18
eISSN - 1883-8022
pISSN - 1881-7629
DOI - 10.20965/ijat.2021.p0529
Subject(s) - supercontinuum , optics , confocal , chromatic aberration , materials science , femtosecond , achromatic lens , chromatic scale , laser , detector , light source , confocal microscopy , optoelectronics , optical fiber , physics , photonic crystal fiber
Confocal probes have been widely adopted in various industries owing to their depth-sectioning effects. A dual-detector differential chromatic confocal probe using a mode-locked femtosecond laser source is proposed herein, and the measurement range expansion of the probe using a supercontinuum light source is discussed. Supercontinuum light has an extremely wide spectrum. A simulation based on wave optics is performed to evaluate the detection sensitivity and measurable range by considering the chromatic aberration of the lens materials. Additionally, an experimental setup is constructed using a supercontinuum light source, and its feasibility is validated. A measurable range of 200 μm is adopted in the experiment, and three-dimensional surface profile measurements are performed. However, the developed confocal probe has not been used for surface topography measurements. Experiments are conducted to verify the performance of the developed probe.