Open AccessThe Criterion for Choosing an Insulator for Sili-con MOS Structures
Author(s) -
Liubomyr Mykolaiovych Korolevych,
Oleksandr Vasyliovych Borysov
Publication year - 2018
Publication title -
mìkrosistemi, elektronìka ta akustika
Language(s) - English
Resource type - Journals
eISSN - 2523-4455
pISSN - 2523-4447
DOI - 10.20535/2523-4455.2018.23.6.141435
Subject(s) - insulator (electricity) , semiconductor , silicon on insulator , materials science , voltage , electronics , charge density , optoelectronics , condensed matter physics , engineering physics , nanotechnology , computer science , electronic engineering , silicon , electrical engineering , physics , quantum mechanics , engineering