Open AccessSimulation of microwave plasma generator
Author(s) -
Volodymyr Volodymyrovych Perevertailo
Publication year - 2018
Publication title -
mìkrosistemi, elektronìka ta akustika
Language(s) - English
Resource type - Journals
eISSN - 2523-4455
pISSN - 2523-4447
DOI - 10.20535/2523-4455.2018.23.1.105252
Subject(s) - microwave , ion source , plasma , materials science , cavity magnetron , generator (circuit theory) , optoelectronics , sputter deposition , inert gas , deposition (geology) , sputtering , thin film , computer science , power (physics) , nanotechnology , physics , telecommunications , paleontology , quantum mechanics , sediment , composite material , biology