Open AccessINFORMATIVITY AS METROLOGICAL CHARACTERISTICS AT DESIGN OF SENSITIVE ELEMENT OF MEMS ACCELEROMETERS
Author(s) -
Vladislav Dubinets
Publication year - 2017
Publication title -
vìsnik kiïvsʹkogo polìtehnìčnogo ìnstitutu. serìâ priladobuduvannâ/vìsnik kiïvsʹkogo polìtehnìčnogo ìnstitutu. serìâ priladobuduvannâ
Language(s) - English
Resource type - Journals
eISSN - 2663-3450
pISSN - 0321-2211
DOI - 10.20535/1970.54(2).2017.119567
Subject(s) - finite element method , suspension (topology) , sensitivity (control systems) , accelerometer , rigidity (electromagnetism) , metrology , acceleration , isotropy , materials science , displacement (psychology) , structural engineering , mechanics , mechanical engineering , engineering , optics , physics , electronic engineering , mathematics , classical mechanics , psychology , quantum mechanics , homotopy , pure mathematics , psychotherapist