Open AccessINVESTIGATION OF CHARACTERISTICS OF THE PLANAR ELASTIC SUSPENSION IN THE DIRECT ACTION AXIAL MICROMECHANICAL ACCELEROMETERS
Author(s) -
I. V. Balabanov,
Тетяна Василівна Балабанова
Publication year - 2014
Publication title -
mehanika giroskopičeskih sistem/mehanìka gìroskopìčnih sistem
Language(s) - English
Resource type - Journals
eISSN - 2519-2272
pISSN - 0203-3771
DOI - 10.20535/0203-377127201438037
Subject(s) - accelerometer , suspension (topology) , displacement (psychology) , planar , acceleration , nonlinear system , stiffness , inertial measurement unit , capacitive sensing , inertial frame of reference , acoustics , materials science , control theory (sociology) , computer science , structural engineering , engineering , physics , electrical engineering , mathematics , classical mechanics , aerospace engineering , artificial intelligence , psychology , computer graphics (images) , control (management) , quantum mechanics , homotopy , pure mathematics , psychotherapist , operating system
Axial accelerometers with a planar silicon suspension and capacitive sensor for inertial mass displacement are one of the most promising navigational sensors at the present time. On the other hand improvement of the precision characteristics remains a primary problem to be investigated for micromechanical sensors.The main requirement for this type of sensors is the constancy of the operating compliance throughout the whole metrical range of the accelerometer. Furthermore, the operating compliance has to be small enough to allow the measurement of the upper limit of acceleration.In the present work we provide the detailed design features analysis for the direct action planar accelerometers.We also show stiffness characteristics of an elastic suspension inside the aforementioned accelerometer and determine the degree of characteristics variation by the displacement of its inertial mass.Further, we investigate the nature of nonlinearity of the scale factor in the direct action axial micromechanical accelerometers and characterize the conditions of its appearance.As a result we propose modifications to the structure of the elastic suspension in the accelerometer for significant reduction of the nonlinearity of its scale factor.