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Fabrication of 5.8‐in. OTFT‐driven flexible color AMOLED display using dual protection scheme for organic semiconductor patterning
Author(s) -
Nakajima Yoshiki,
Takei Tatsuya,
Tsuzuki Toshimitsu,
Suzuki Mitsunori,
Fukagawa Hirohiko,
Yamamoto Toshihiro,
Tokito Shizuo
Publication year - 2009
Publication title -
journal of the society for information display
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.578
H-Index - 52
eISSN - 1938-3657
pISSN - 1071-0922
DOI - 10.1889/jsid17.8.629
Subject(s) - amoled , materials science , optoelectronics , thin film transistor , oled , flexible display , pentacene , organic semiconductor , photolithography , fabrication , layer (electronics) , color gel , active matrix , nanotechnology , medicine , alternative medicine , pathology
Abstract— A 5.8‐in. wide‐QQVGA flexible color active‐matrix organic light‐emitting‐diode (AMOLED) display consisting of organic thin‐film transistors (OTFTs) and phosphorescent OLEDs was fabricated on a plastic film. To reduce the operating voltage of the OTFTs, Ta 2 O 5 with a high dielectric constant was employed as a gate insulator. Pentacene was used for the semiconductor layer of the OTFTs. This layer was patterned by photolithography and dry‐etched using a dual protection layer of poly p ‐xylylene and SiO 2 film. Uniform transistor performance was achieved in the OTFT backplane with QQVGA pixels. The RGB emission layers of the pixels were formed by vacuum deposition of phosphorescent small molecules. The resulting display could clearly show color moving images even when it was bent and operated at a low driving voltage (below 15 V).