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Hybrid MEMS optical scanner for volumetric 3‐D displays
Author(s) -
Ohira Yasutaka,
Chekhovskiy Aleksandr,
Yamanoi Toshio,
Endo Takashi,
Fujita Hiroyuki,
Toshiyoshi Hiroshi
Publication year - 2009
Publication title -
journal of the society for information display
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.578
H-Index - 52
eISSN - 1938-3657
pISSN - 1071-0922
DOI - 10.1889/jsid17.5.419
Subject(s) - microelectromechanical systems , scanner , materials science , laser scanning , optics , laser , optoelectronics , fabrication , optical power , power (physics) , reflection (computer programming) , computer science , physics , medicine , alternative medicine , pathology , quantum mechanics , programming language
— A fabrication technique and characteristics of high‐power‐handling microelectromechanical systems (MEMS) optical scanners for laser 3‐D volumetric‐image display application is reported. The MEMS scanner is designed to control the reflection of high‐power YAG‐laser beam by using the optomechanical combination of a dielectric‐film‐coated mirror cube and an electrostatic‐MEMS‐scanner platform. These hybrid‐type MEMS optical scanners have a stroke of about 20° at resonant frequencies of 600 Hz when a 45‐V pulse voltage is applied.