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15.1: Invited Paper : Super Grain Silicon Technology for AMOLED TV Applications
Author(s) -
Lee KiYong
Publication year - 2011
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.3621232
Subject(s) - amoled , materials science , pmos logic , brightness , thin film transistor , backplane , optoelectronics , electrical engineering , voltage , nanotechnology , optics , engineering , transistor , active matrix , physics , layer (electronics)
Super Grain Silicon SGS technology has been developed for TFT backplanes for large area AMOLED TVs. PMOS TFTs based on the SGS method have mobility above 50 cm 2 /V‐s and off‐current below 10− 12 A, which enable mass production of AMOLED TVs on next generation fabs. Pixel‐to‐pixel brightness uniformity, related to leakage current and grain boundaries, was improved from below 85% to above 90%. ΔV th and brightness uniformity of 14″ TV panels are 1.13V and 83%, respectively, over the entire Gen. 6 area. Potential and technical issues of the SGS process for AMOLED TVs will be further discussed.