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61.4: High‐Performance and Highly Rollable a‐IGZO TFTs Adopting Composite Electrodes and Transparent Polyimide Substrates
Author(s) -
Chien ChihWei,
Hsieh HsingHung,
Wu ChengHan,
Tsai YuTang,
Kung YenCheng,
Hsu PoChing,
Lin ChangYu,
Wu ChungChih,
Yeh YungHui,
Leu ChyiMing,
Lee TzongMing
Publication year - 2010
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.3500631
Subject(s) - polyimide , materials science , electrode , optoelectronics , composite number , etching (microfabrication) , bend radius , oxide , nanotechnology , composite material , layer (electronics) , chemistry , bending , metallurgy
We have demonstrated high‐performance and highly rollable flexible oxide TFTs on fully transparent/colorless polyimide substrates by adopting lithographic and etching processes and composite electrodes. The TFTs exhibited a field‐effect mobility of up to 15.9 cm 2 /Vs, a sub‐threshold swing of 0.43 V/decade, and an on/off ratio of > 10 8 . The devices could be bent down to a radius of 3 mm and yet remained normally functional.