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46.3: OLED Manufacturing System Equipped by Planar Evaporation Source
Author(s) -
Fujimoto Eishi,
Daiku Hiroyuki,
Kamikawa Kenji,
Fujimoto Emiko,
Matsumoto Yuji
Publication year - 2010
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.3500563
Subject(s) - oled , planar , materials science , evaporation , layer (electronics) , deposition (geology) , optoelectronics , substrate (aquarium) , process (computing) , process engineering , nanotechnology , computer science , engineering , geology , physics , computer graphics (images) , paleontology , oceanography , sediment , thermodynamics , operating system
OLED manufacturing equipment utilizes Planar Evaporation Source for the organic layer static deposition process has been developed. In order to improve the OLED deposition productivity by reducing the substrate handling time, Multiple Planar Source to deposit all the organic layers in one process chamber by the valve switching of the organic vapor is proposed.