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P‐174: Piezoelectric Tuning Technology to Compensate for Variation in Resonant Frequency in a MEMS Mirror
Author(s) -
Honda Takeshi,
Takanashi Nobuyuki,
Ishibashi Osamu,
Okumura Fujio
Publication year - 2010
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.3500392
Subject(s) - piezoelectricity , torsion (gastropod) , microelectromechanical systems , materials science , bar (unit) , voltage , optics , torsion spring , acoustics , optoelectronics , physics , electrical engineering , engineering , medicine , surgery , classical mechanics , meteorology
An effective method to tune the resonant frequency of a micro scanning mirror with a piezoelectric element is presented. Though the resonant frequency (fr) is determined by the structure and size of the micromirror and the torsion bar, the fr varies according to the environmental temperature, driving voltage, and fatigue of the torsion beams. We have developed an effective mechanism to control the stress of the torsion bars using the piezoelectric elements and we succeeded in tuning 0.9% of the resonant frequency of the scanning mirror which corresponds to the variation of the emvironmental temperature with 83 degree.