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72.3: Protrusive Interception for TFT‐LCDs Using Side‐view Illumination Method
Author(s) -
Tzu FuMing,
Chou JungHua
Publication year - 2010
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.3499839
Subject(s) - interception , materials science , computer vision , computer science , optics , artificial intelligence , physics , biology , ecology
An innovative method using side illuminations with digital CCDs to detect the specific protrusions for color filters of TFTLCD is developed in this study. The experimental results show that the detection of the protrusion with the height of 280 μm at ±7% uncertainty can be achieved within 3 seconds for the 1850 mm*1500 mm panel. In other words, the method is very effective to prevent the high‐value photo‐mask from damage.