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63.1: Responsive Vacuum Deposition Technology for Cost‐Effective OLED Manufacturing
Author(s) -
Long Michael,
Koppe Bruce,
Redden Neil,
Boroson Michael
Publication year - 2009
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.3256954
Subject(s) - vaporization , deposition (geology) , oled , cluster (spacecraft) , flash (photography) , computer science , materials science , process engineering , nanotechnology , operating system , chemistry , engineering , physics , optics , paleontology , organic chemistry , layer (electronics) , sediment , biology
Abstract The ability to interrupt and reinitiate vaporization rapidly to precisely controlled rates is an important requirement for reducing the deposition cost component of OLED displays for both in‐line and cluster tool configurations. A flash vaporization deposition system using closed‐loop control is described that achieves these objectives.