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56.3: High Corrosion Resistance Mo Alloy for TFT‐LCD and Touch Screen Panel Metallization
Author(s) -
Winkler Jörg,
Reinfried Nikolaus,
Knabl Wolfram
Publication year - 2009
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.3256925
Subject(s) - alloy , materials science , passivation , x ray photoelectron spectroscopy , corrosion , molybdenum , metallurgy , thin film transistor , layer (electronics) , sputtering , oxide , sputter deposition , optoelectronics , composite material , thin film , chemical engineering , nanotechnology , engineering
A new Molybdenum‐based alloy with high resistance against corrosion and oxidation was developed for TFT display and touch screen panel metallization. Highly environmentally stable alloy films with low resistivity and low film stress were made by DC magnetron sputtering. The oxide passivation layer was characterized by photoelectron spectroscopy (XPS).