P‐191L:  Late‐News Poster : Fabrication of High Efficient Green Emission Zinc Oxide Films at Low Temperature by Radio Frequency Magnetron Sputtering | Zendy

Li Chaoyang | Zendy; Matsuda Tokiyoshi | Zendy; Kawaharamura Toshiyoki | Zendy; Furuta Hiroshi | Zendy; Hiramatsu Takahiro | Zendy; Furuta Mamoru | Zendy; Hirao Takashi | Zendy

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P‐191L: Late‐News Poster : Fabrication of High Efficient Green Emission Zinc Oxide Films at Low Temperature by Radio Frequency Magnetron Sputtering

Author(s) -

Li Chaoyang,

Matsuda Tokiyoshi,

Kawaharamura Toshiyoki,

Furuta Hiroshi,

Hiramatsu Takahiro,

Furuta Mamoru,

Hirao Takashi

Publication year - 2009

Publication title -

sid symposium digest of technical papers

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.351

H-Index - 44

eISSN - 2168-0159

pISSN - 0097-966X

DOI - 10.1889/1.3256582

Subject(s) - sputter deposition , zinc , materials science , excitation , optoelectronics , fabrication , luminescence , phosphor , thin film , cavity magnetron , sputtering , oxide , analytical chemistry (journal) , metallurgy , chemistry , nanotechnology , electrical engineering , environmental chemistry , engineering , medicine , alternative medicine , pathology

Zinc oxide thin films phosphors were successfully prepared by radio frequency magnetron sputtering at low temperature. Strong green emissions with a peak at around 505 nm, and a CL luminescence of about 10,580 Cd/m 2 under excitation of 10 kV, 1mA/ cm 2 were obtained.

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