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P‐191L: Late‐News Poster : Fabrication of High Efficient Green Emission Zinc Oxide Films at Low Temperature by Radio Frequency Magnetron Sputtering
Author(s) -
Li Chaoyang,
Matsuda Tokiyoshi,
Kawaharamura Toshiyoki,
Furuta Hiroshi,
Hiramatsu Takahiro,
Furuta Mamoru,
Hirao Takashi
Publication year - 2009
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.3256582
Subject(s) - sputter deposition , zinc , materials science , excitation , optoelectronics , fabrication , luminescence , phosphor , thin film , cavity magnetron , sputtering , oxide , analytical chemistry (journal) , metallurgy , chemistry , nanotechnology , electrical engineering , environmental chemistry , engineering , medicine , alternative medicine , pathology
Zinc oxide thin films phosphors were successfully prepared by radio frequency magnetron sputtering at low temperature. Strong green emissions with a peak at around 505 nm, and a CL luminescence of about 10,580 Cd/m 2 under excitation of 10 kV, 1mA/ cm 2 were obtained.